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Characterization and Metrology for ULSI Technology: 1998 International Conference, 23-27 March 1998: National Institute of Standards and Technology, Gaithersburg MD, USA (AIP Conference Proceedings S.)
Author:
D.G. Seiler
, A.C. Diebold
, W.M. Bullis
, T.J. Shaffner
, R. McDonald
, E.J. Walters
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| Characterization and Metrology for ULSI Technology: 1998 International Conference, 23-27 March 1998: National Institute of Standards and Technology, Gaithersburg MD, USA (AIP Conference Proceedings S.) |
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Find Characterization and Metrology for ULSI Technology: 1998 International Conference, 23-27 March 1998: National Institute of Standards and Technology, Gaithersburg MD, USA (AIP Conference Proceedings S.) in our books section.
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ISBN:
1563967537
Format:
Hardcover
Price:
£ 245.50
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Publisher:
American Institute of Physics
Publication date:
1998-12-15
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Thursday, March 31, 2005
